Chemistry of inorganic compounds – Modifying or removing component of normally gaseous mixture – Organic component
Reexamination Certificate
2007-10-23
2007-10-23
Nguyen, Ngoc-Yen (Department: 1754)
Chemistry of inorganic compounds
Modifying or removing component of normally gaseous mixture
Organic component
C423S245300, C423S439000, C075S444000
Reexamination Certificate
active
10832672
ABSTRACT:
Method for removing tar-forming hydrocarbons from an effluent gas mixtures from Chemical Vapor Deposition or Chemical Vapor Infiltration processes. Method includes passing at elevated temperature effluent gas mixture containing hydrogen, methane, and high molecular weight hydrocarbons through a bed that contains iron pellets, thereby decomposing tar-forming high molecular weight hydrocarbons in the effluent gas mixture. Apparatus including a de-tarring vessel (5) having a packed bed (7, 8, 9) of iron or iron oxide pellets (1) resting over a perforated distributor plate (2) and having an exhaust port (12), said de-tarring vessel being operatively linked via an exhaust port (6) to a CVI or CVD reactor vessel.
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Shumaker Craig B.
Walker Terence B.
Honeywell International , Inc.
Nguyen Ngoc-Yen
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