Method of removing tar-forming gases from CVD/CVI furnace...

Details Method of removing tar-forming gases from CVD/CVI furnace... Method of removing tar-forming gases from CVD/CVI furnace...

2007-10-23

2007-10-23

Nguyen, Ngoc-Yen (Department: 1754)

Chemistry of inorganic compounds

Modifying or removing component of normally gaseous mixture

Organic component

C423S245300, C423S439000, C075S444000

Reexamination Certificate

active

10832672

ABSTRACT:
Method for removing tar-forming hydrocarbons from an effluent gas mixtures from Chemical Vapor Deposition or Chemical Vapor Infiltration processes. Method includes passing at elevated temperature effluent gas mixture containing hydrogen, methane, and high molecular weight hydrocarbons through a bed that contains iron pellets, thereby decomposing tar-forming high molecular weight hydrocarbons in the effluent gas mixture. Apparatus including a de-tarring vessel (5) having a packed bed (7, 8, 9) of iron or iron oxide pellets (1) resting over a perforated distributor plate (2) and having an exhaust port (12), said de-tarring vessel being operatively linked via an exhaust port (6) to a CVI or CVD reactor vessel.

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