Method of removing organic impurities from water

Liquid purification or separation – Processes – Liquid/liquid solvent or colloidal extraction or diffusing...

Reexamination Certificate

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Details

C210S663000, C210S702000, C210S764000, C210S774000, C210S806000

Reexamination Certificate

active

06858145

ABSTRACT:
In addition to health implications, trihalomethanes (THMs) poses a challenge to the electronic industry where such impurities cannot be tolerated. A process is provided for removing THMs from high-purity water used in the electronic industry. The method of the invention comprises contacting the high-purity water with a membrane degassifier, preferably operating at a temperature exceeding 45° C.

REFERENCES:
patent: 4875980 (1989-10-01), Arita et al.
patent: 5266206 (1993-11-01), Baker et al.
patent: 5387378 (1995-02-01), Pintauro et al.
patent: 5512178 (1996-04-01), Dempo
patent: 6039878 (2000-03-01), Sikdar et al.
patent: 6440309 (2002-08-01), Cohen
patent: 6623637 (2003-09-01), Monzen et al.

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