Liquid purification or separation – Processes – Utilizing electrical or wave energy directly applied to...
Reexamination Certificate
2005-06-07
2005-06-07
Lawrence, Frank M. (Department: 1724)
Liquid purification or separation
Processes
Utilizing electrical or wave energy directly applied to...
C134S001300, C204S275100, C205S771000
Reexamination Certificate
active
06902677
ABSTRACT:
A method of removing a metal ion from a treating liquid for use in treating a substrate comprises the steps of: applying a first voltage via an electrode to the treating liquid that flows in a supply piping so that deposition can occur; and applying a second voltage higher than the first voltage to the electrode while distributing a cleaning liquid to the supply piping, so that ionization can occur.
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Dainippon Screen Mfg. Co,. Ltd.
Lawrence Frank M.
Ostrolenk Faber Gerb & Soffen, LLP
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