Method of removing metal ion and apparatus for treating...

Liquid purification or separation – Processes – Utilizing electrical or wave energy directly applied to...

Reexamination Certificate

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C134S001300, C204S275100, C205S771000

Reexamination Certificate

active

06902677

ABSTRACT:
A method of removing a metal ion from a treating liquid for use in treating a substrate comprises the steps of: applying a first voltage via an electrode to the treating liquid that flows in a supply piping so that deposition can occur; and applying a second voltage higher than the first voltage to the electrode while distributing a cleaning liquid to the supply piping, so that ionization can occur.

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patent: 4337129 (1982-06-01), Soboroff et al.
patent: 4545877 (1985-10-01), Hillis
patent: 4755265 (1988-07-01), Young
patent: 4857159 (1989-08-01), Davis et al.
patent: 6001238 (1999-12-01), Takayasu et al.
patent: 6332973 (2001-12-01), Stice
patent: 2002/0185446 (2002-12-01), Johnny
patent: 06-204201 (1994-07-01), None
patent: 2739419 (1998-01-01), None

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