Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
Patent
1997-07-31
1999-02-09
Warden, Jill
Cleaning and liquid contact with solids
Processes
Using sequentially applied treating agents
134 1, 134 2, 134 13, 134 21, 134 28, 134 29, 134 31, 134 36, 134902, 438745, 438753, 438756, 438749, 438902, B08B 300
Patent
active
058688625
ABSTRACT:
A method of removing inorganic contamination (contamination 104 of FIGS. 2a-2b) from a layer (layer 102) overlying a substrate (substrate 100), the method comprising the steps of: removing the layer overlying the substrate with at least one removal agent; reacting the inorganic contamination with at least one conversion agent, thereby converting the inorganic contamination; removing the converted inorganic contamination by subjecting it to at least one solvent agent, the solvent agent included in a first supercritical fluid; and wherein the converted inorganic contamination is more highly soluble in the solvent agent than the inorganic contamination.
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Douglas Monte A.
Templeton Allen C.
Carrillo S.
Donaldson Richard L.
Hoel Carl H.
Texas Instruments Incorporated
Valetti Mark A.
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