Method of removing etching residue

Details Method of removing etching residue Method of removing etching residue

1997-03-27

1999-06-15

Einsmann, Margaret

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

134 2, 134 38, 510175, 510176, 510499, B08B 308, C11D 330, C11D 343

Patent

active

059118350

ABSTRACT:
A (method using a composition) for removing resists and etching residue from substrates containing at least one nucleophilic amine compound having oxidation and reduction potentials, at least one organic solvent, water and, optionally, a chelating agent. The chelating agent is preferred to be included since it provides added stability and activity to the cleaning composition so that the composition has long term effectiveness. If a chelating agent is not present, the composition, while providing for adequate stripping and cleaning upon initial use of the composition following mixing, has only short term stability. In this latter instance, the nucleophilic amine compound and organic solvent components of the composition preferably are maintained separate from each other until it is desired to use the composition. Thereafter, the components are combined. Following use of the composition, the non-used portion of the composition can be disposed of or be reactivated by the addition of a chelating agent.

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