Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1986-02-28
1988-09-27
Dixon, Jr., William R.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
501 88, 501 92, 264 81, 264 82, 264121, 423DIG9, 20419211, 20419216, C04B 3552, C04B 3558, C04B 3584
Patent
active
047741031
ABSTRACT:
Silicon and nitrogen ions are implanted in a ceramic body of silicon carbide and the ceramic body is heated in a nonoxidizing atmosphere, whereby it is reinforced.
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patent: 3620827 (1971-11-01), Collett
patent: 3725099 (1973-04-01), Nozik et al.
patent: 3900636 (1975-08-01), Curry et al.
patent: 4571348 (1986-02-01), Troxell
patent: 4576923 (1986-03-01), Broussaud et al.
patent: 4592129 (1986-06-01), Legge
patent: 4612297 (1986-09-01), Kasai et al.
patent: 4624858 (1986-11-01), Capra et al.
"Ceramic Processing", Publication 1576, National Academy of Sciences, Washington, D.C., 1968, p. 86.
"Ion Implantation in SiC", Marsh, in Silicon Carbide-1973, Proc. 3rd Int. Conf. on SiC, eds. Marshall, Faust, and Ryan.
Doi Haruo
Kamigaito Osami
Noda Shoji
Dixon Jr. William R.
Griffis Andrew B.
Kabushiki Kaisha Toyota Chuo Kenkyusho
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