Method of regenerating a vacuum pumping device

Details Method of regenerating a vacuum pumping device Method of regenerating a vacuum pumping device

1990-12-05

1992-05-19

Bertsch, Richard A.

Pumps

Processes

4174234, 417901, 62 555, F04B 1508

Patent

active

051143160

ABSTRACT:
In a vacuum pumping device regeneration method, the temperature of the trap is raised to a temperature at which a molecule trapping chamber such as a cold molecules trapped by the trap are sublimated while the trap is maintained vacuum. Thereafter, the gas in which the molecules in a vapor state are present is removed from the trap without the temperature of the trap being raised to room temperatures without the pressure of the trap being to an atmospheric pressure. Consequently, contamination of the system can be avoided.

REFERENCES:
patent: 3066849 (1962-12-01), Beams
patent: 4456433 (1984-06-01), Henning et al.
patent: 4479927 (1984-10-01), Gelernt
patent: 4485631 (1984-12-01), Winkler
patent: 4838035 (1989-06-01), Carlson et al.

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