Method of refining scrap silicon using an electron beam

Details Method of refining scrap silicon using an electron beam Method of refining scrap silicon using an electron beam

2005-06-02

2009-12-15

Wyszomierski, George (Department: 1793)

Specialized metallurgical processes, compositions for use therei

Processes

Electrothermic processes

C075S010100

Reexamination Certificate

active

07632329

ABSTRACT:
A method of refining scrap silicon using an electron beam includes a step of selectively preparing lumps of n-type scrap silicon containing a specific impurity element as a dopant, a step of crushing the prepared lumps of scrap silicon, a step of placing the crushed silicon into a vacuum vessel, a step of irradiating the crushed silicon which was placed into the vacuum vessel with an electron beam to melt it and vaporize at least a portion of the impurity element, and a step of solidifying the resulting silicon.

REFERENCES:
patent: 4049123 (1977-09-01), Fegley et al.
patent: 6231826 (2001-05-01), Hanazawa et al.
patent: 10245216 (1998-09-01), None

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