Fishing – trapping – and vermin destroying
Patent
1992-04-15
1994-01-18
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437247, 437941, H01L 21324
Patent
active
052799816
ABSTRACT:
The present invention is intended to provide a method of fabricating an EEPROM having excellent endurance characteristics. A work obtained by processing a substrate (1) by a wafer processing process including a passivating process and having a tunnel oxide film, an aluminum wiring film and a passivation film is subjected to a low-temperature heat treatment employing a processing temperature of about 250.degree. C. and a processing time on the order of 50 hr in a thermostatic oven (20) in the presence of nitrogen gas. The low-temperature heat treatment reduces trap sites produced in the tunnel oxide film by a plasma CVD process carried out to form the passivation film to repair the tunnel oxide film damaged by the plasma CVD process and to improve the endurance characteristics. The aluminum wiring film is not deteriorated by the low-temperature heat treatment because the low-temperature heat treatment employs a relatively low processing temperature.
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patent: 5017979 (1991-05-01), Fujii et al.
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Asai Akiyoshi
Fukatsu Shigemitsu
Chaudhari C.
Hearn Brian E.
Nippondenso Co. Ltd.
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