Method of reducing the time required to perform a passive...

Image analysis – Applications – Manufacturing or product inspection

Reexamination Certificate

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Reexamination Certificate

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07848562

ABSTRACT:
The time required to perform a passive voltage contrast test of an area of interest of a layer of interest is substantially reduced by digitizing a passive voltage contrast image to form contrast data that represents the image, and comparing the contrast data to computer aided design (CAD) data that defines the semiconductor device.

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patent: 2008/0024601 (2008-01-01), Sato et al.
patent: 2010/0070942 (2010-03-01), Madurawe

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