Stock material or miscellaneous articles – Web or sheet containing structurally defined element or... – Composite having voids in a component
Reexamination Certificate
2008-12-10
2011-11-08
Xu, Ling (Department: 1784)
Stock material or miscellaneous articles
Web or sheet containing structurally defined element or...
Composite having voids in a component
C428S312800, C428S307300, C428S307700, C428S702000, C428S704000
Reexamination Certificate
active
08053072
ABSTRACT:
This invention relates to an article having a reduced porosity and a method for sealing porosity of at least a portion of an outer porous surface of an article, said method comprising (i) applying a sealant solution on the outer porous surface of said article, (ii) infiltrating at least a portion of the outer porous surface with said sealant solution, and (iii) allowing the infiltrated sealant solution to react, thereby forming an infiltrated solid precipitate, said infiltrated solid precipitate sealing the porosity of at least a portion of the outer porous surface of said article. The method is useful, for example, in the protection of integrated circuit manufacturing equipment, internal chamber components, and electrostatic chuck manufacture.
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Dalal Nilay S.
Praxair Technology Inc.
Schwartz Iurie A.
Xu Ling
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