Method of reducing metallic impurities in ozone gas piping

Chemistry: electrical and wave energy – Processes and products – Electrostatic field or electrical discharge

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C01B 1310

Patent

active

058109781

ABSTRACT:
A method of reducing metallic impurities in an ozone gas piping means, which entails producing ozone gas in an ozone-generating means and piping the produced ozone gas to stainless steel piping means, wherein the ozone gas is produced from a raw material oxygen gas containing at least one additional gas selected from the group consisting of nitrogen, helium, carbon dioxide, carbon monoxide and ozone; the additional gas being used in an amount of 0.025% by volume or more in total, with the proviso that nitrogen is not used as or in said additional gas in an amount of more than 1.0% by volume.

REFERENCES:
patent: 5370846 (1994-12-01), Yokomi et al.
patent: 5632868 (1997-05-01), Harada et al.

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