Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Including integrally formed optical element
Reexamination Certificate
2006-02-21
2009-12-01
Mulpuri, Savitri (Department: 2812)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Including integrally formed optical element
Reexamination Certificate
active
07625771
ABSTRACT:
A method for reducing insertion loss in a transition region between a plurality of input or output waveguides to a free space coupler region in a photonic integrated circuit (PIC) includes the steps of forming a passivation layer over the waveguides and region and forming the passivation overlayer such that it monotonically increases in thickness through the transition region to the free space coupler region.
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Joyner Charles H.
Kish, Jr. Fred A.
Missey Mark J.
Nagarajan Radhakrishnan L.
Carothers, Jr. W. Douglas
Infinera Corporation
Mulpuri Savitri
Soltz David L.
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