Method of reducing edge current leakage in N channel silicon-on-

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating

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29571, 156656, 156657, 156665, 357 23, C23C 1500

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active

043138098

ABSTRACT:
A novel process for improving the operation of silicon-on-sapphire devices by removing or minimizing edge current leakage. The reduction in leakage current is accomplished by subjecting the completed device to a sputtering operation and depositing thereon a layer of, for example, aluminum which is subsequently removed prior to scribing and dicing.

REFERENCES:
patent: 3890632 (1975-06-01), Ham et al.
patent: 4111775 (1978-09-01), Hollis, Jr. et al.

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