Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1980-10-15
1982-02-02
Weisstuch, Aaron
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
29571, 156656, 156657, 156665, 357 23, C23C 1500
Patent
active
043138098
ABSTRACT:
A novel process for improving the operation of silicon-on-sapphire devices by removing or minimizing edge current leakage. The reduction in leakage current is accomplished by subjecting the completed device to a sputtering operation and depositing thereon a layer of, for example, aluminum which is subsequently removed prior to scribing and dicing.
REFERENCES:
patent: 3890632 (1975-06-01), Ham et al.
patent: 4111775 (1978-09-01), Hollis, Jr. et al.
Benyon, Jr. Carl W.
O'Neill, Jr. John J.
Benjamin Lawrence P.
Cohen Donald S.
Morris Birgit E.
RCA Corporation
Weisstuch Aaron
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