Fishing – trapping – and vermin destroying
Patent
1995-11-13
1997-12-23
Niebling, John
Fishing, trapping, and vermin destroying
190 24, A01L 2128
Patent
active
057007179
ABSTRACT:
A system and method for reducing the contact resistance associated with tungsten plug contacts to P-doped diffusion regions of a semiconductor device. Before or during the formation of the tungsten plug contacts, a high energy, low dosage of an N-dopant or neutral species such as silicon or germanium is implanted into the P-doped diffusion regions of the semiconductor device. The implantation causes lattice damage within the P-doped diffusion regions, enhancing diffusion of the P-dopant within the P-doped diffusion regions. This results in the P-dopant diffusing toward the contact, replacing dopant lost to segregation into the contact metalization, and thus reducing the contact resistance.
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Ding Lily
Loh Ying-Tsong
Nowak Edward D.
Bilodeau Thomas G.
Niebling John
VLSI Technology Inc.
Williams Gary S.
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