Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-06-23
2009-08-25
Kim, Peter B (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S077000, C355S055000
Reexamination Certificate
active
07580113
ABSTRACT:
A method of reducing a wave front aberration is provided for a lithographic process whereby the reducing is based on the selected pattern to be printed and the selected illumination mode used for exposure. Wave front aberrations of a projection system of a lithographic apparatus are measured and reduced by calculating adjustments of optical elements of the projection system and applying the calculated adjustments to the projection system. The calculation of adjustments is based on information on a spatial distribution of radiant intensity in a pupil of the projection system as present during exposing the radiation sensitive layer, and is limited to aberrations in projection lens pupil areas of relative high radiant flux.
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De Klerk Johannes Wilhelmus
Jorritsma Laurentius Catrinus
Stoffels Freerk Adriaan
Tel Wim Tjibbo
Uitterdijk Tammo
ASML Netherlands B.V.
Kim Peter B
Pillsbury Winthrop Shaw & Pittman LLP
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