Method of recycling inert gas

Details Method of recycling inert gas Method of recycling inert gas

2005-07-08

2008-12-16

Chen, Bret (Department: 1792)

Coating processes

With post-treatment of coating or coating material

Coating material recirculation or regeneration

C427S398500, C427S248100

Reexamination Certificate

active

07465476

ABSTRACT:
A method for recycling an inert gas evacuated from a material deposition process chamber10comprises cooling the evacuated inert gas and recirculating a proportion of the cooled gas to the chamber10at a first temperature for use as a cooling gas in the material deposition process12, and recirculating a proportion of the cooled gas to the chamber10at a second temperature for use as a shielding gas in the material deposition process12, the second temperature being higher than the first temperature. Apparatus22for recycling an inert gas is also disclosed.

REFERENCES:
patent: 3610876 (1971-10-01), Bhat
patent: 4616694 (1986-10-01), Hsieh
patent: 5227038 (1993-07-01), Smalley
patent: 5250780 (1993-10-01), Hansz
patent: 5590387 (1996-12-01), Schmidt et al.
patent: 5897682 (1999-04-01), Koaizawa
patent: 5958348 (1999-09-01), Bi et al.
patent: 6113754 (2000-09-01), Oh
patent: 6364932 (2002-04-01), Ji et al.
patent: 6759085 (2004-07-01), Muehlberger
patent: 2004/0126499 (2004-07-01), Heinrich et al.
patent: 2004/0222383 (2004-11-01), Kawakami
patent: 0 757 918 (1997-02-01), None
patent: 6 224 144 AB (1994-08-01), None

Affiliated with

Also associated with

Rating

Method of recycling inert gas does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of recycling inert gas, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of recycling inert gas will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4030450