Gas separation: processes – Selective diffusion of gases – Selective diffusion of gases through substantially solid...
Reexamination Certificate
2005-10-18
2005-10-18
Webb, Gregory (Department: 1751)
Gas separation: processes
Selective diffusion of gases
Selective diffusion of gases through substantially solid...
C095S045000, C095S053000, C095S108000
Reexamination Certificate
active
06955707
ABSTRACT:
A method and apparatus is disclosed for producing fluorine by providing a contained fluorine precursor source located proximate to or remotely from an adsorbent bed, optionally in a replaceable unit that may be a replaceable module comprising both the fluorine source and the adsorbent bed. Fluorine derived preferably from a nitrogen trifluoride source and used to remove deposited silicon-containing impurities in reaction chambers is reclaimed from an adsorbent bed, and made available to the reaction chamber as a supplemental fluorine source to reduce the total required amount of nitrogen trifluoride source gas. The separation column adsorbent is regenerated in cyclical intervals using a reverse flow of inert gas.
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European Search Report completed Sep. 23, 2003 of Application No. EP 03 25 3591.
Ezell Edward Frederick
Hogle Richard A.
McFarlane Graham A.
Whitlock Walter H.
Hey David A.
Nicholes Mary K.
The BOC Group Inc.
Webb Gregory
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