Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2008-03-04
2008-03-04
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C324S230000, C438S014000, C702S170000
Reexamination Certificate
active
11105052
ABSTRACT:
An operation method of a recipe control process in which multiple processing targets are processed continuously in a processing apparatus using recipes that specify a set of control parameters specifying the processing conditions of processing targets. The method comprises the steps of: (I) specifying correction coefficients to correct at least one of the parameters' values for each processing target, separately from the recipes, and (II) performing the recipe control process for multiple processing targets and applying the correction coefficients to each processing target to adjust the parameters' values.
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Noguchi Satoru
Takizawa Masahiro
Wada Takashi
ASM Japan K.K.
Knobbe Martens Olson & Bear LLP
Lee Douglas S
Picard Leo
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