Method of recipe control operation

Details Method of recipe control operation Method of recipe control operation

2008-03-04

2008-03-04

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C324S230000, C438S014000, C702S170000

Reexamination Certificate

active

07340320

ABSTRACT:
An operation method of a recipe control process in which multiple processing targets are processed continuously in a processing apparatus using recipes that specify a set of control parameters specifying the processing conditions of processing targets. The method comprises the steps of: (I) specifying correction coefficients to correct at least one of the parameters' values for each processing target, separately from the recipes, and (II) performing the recipe control process for multiple processing targets and applying the correction coefficients to each processing target to adjust the parameters' values.

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patent: 2002-343726 (2002-11-01), None
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