Chemistry: electrical and wave energy – Processes and products – Electrostatic field or electrical discharge
Patent
1975-04-24
1977-03-29
Prescott, Arthur C.
Chemistry: electrical and wave energy
Processes and products
Electrostatic field or electrical discharge
65 30R, 204130, 2041571R, 250283, C25D 112, G01N 2700
Patent
active
040147720
ABSTRACT:
An electronic device, such as a metal-oxide-semiconductor (MOS) transistor, is radiation hardened by removing impurities such as sodium and other alkali species, from the oxide. The impurities are first caused to migrate to the surface of the oxide by exposure to electromagnetic radiation having an energy greater than the oxide band gap while the oxide is immersed in an electric field. The impurities are then rinsed from the surface of the oxide with a solvent.
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Williams Richard
Woods Murray Henderson
Christoffersen H.
Muckelroy W. L.
Prescott Arthur C.
RCA Corporation
Williams R. P.
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