Method of purifying gaseous nitrogen trifluoride

Details Method of purifying gaseous nitrogen trifluoride Method of purifying gaseous nitrogen trifluoride

2006-04-04

2006-04-04

Langel, Wayne A. (Department: 1754)

Gas separation: processes

Solid sorption

Inorganic gas or liquid particle sorbed

C095S142000, C423S406000

Reexamination Certificate

active

07022160

ABSTRACT:
The present invention relates to a method of purifying gaseous nitrogen trifluoride from CF4as impurity.The method comprises selective adsorption of nitrogen trifluoride by dehydrated erionite at a temperature of from −30 to 30° C., displacement of carbon tetrafluoride by an inert gas, desorption and condensation of the purified nitrogen trifluoride. The purification yields 99.99% pure NF3with CF4content not over 10 ppm.The proposed method of NF3sorption purification makes it possible to carry out the process at an ambient temperature and with long operating life of the sorbent. The method is practically feasible, economically expedient, and easy to implement under industrial conditions.

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