Method of purifying and depositing group IIIa and group Va compo

Details Method of purifying and depositing group IIIa and group Va compo Method of purifying and depositing group IIIa and group Va compo

1987-05-12

1988-09-20

Spitzer, Robert

Gas separation

Means within gas stream for conducting concentrate to collector

55 72, 423 87, 423130, B01D 1508

Patent

active

047722967

ABSTRACT:
Thermally decomposable Group IIIa compounds are purified by conveying the relatively impure material through a prescrubber module, then heating the scrubbed Group IIIa compound and conveying same through a preconditioned gas chromatographic column packed with a porous polymeric material. After isolation, the purified material is cooled, demisted amd collected. Thermally decomposable Group Va compounds are purified by conveying the heated relatively impure material through a preconditioned gas chromatographic column packed with a porous polymeric material. After isolation, the purified material is cooled and collected. Epitaxial semiconductor films of purified thermally decomposable Group IIIa and Group Va compounds with added dopant are prepared by diluting the film components with inert carrier gas to predetermined concentration levels, thoroughly mixing the components, then depositing a crystal layer prepared from the mixed components onto a substrate by thermally decomposing the mixed components in a reactor.

REFERENCES:
patent: 3019087 (1962-01-01), Jacob et al.
patent: 3041141 (1962-06-01), Shoemaker et al.
patent: 4070444 (1978-01-01), Ingle
patent: 4159966 (1979-07-01), Roberts
patent: 4532120 (1985-07-01), Smith et al.
patent: 4537759 (1985-08-01), Walker et al.

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