Method of providing images of surfaces with a correlation micros

Details Method of providing images of surfaces with a correlation micros Method of providing images of surfaces with a correlation micros

1991-05-14

1993-03-16

Willis, Davis L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356360, 382 43, G01B 1124

Patent

active

051949180

ABSTRACT:
A method of processing the interference signals form a correlation microscope to provide images of a surface being examined. The interference signals for a plurality of x,y locations at a plurality of z positions are transformed to provide an intensity envelope of the signals along the z axis for each x,y location. The intensity envelope can then be processed to provide desired images.

REFERENCES:
patent: 4854708 (1989-08-01), Kafri et al.
patent: 5018861 (1991-05-01), Remo

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