Method of providing context specific recipes in a...

Details Method of providing context specific recipes in a... Method of providing context specific recipes in a...

2011-06-14

2011-06-14

LeRoux, Etienne P (Department: 2161)

Data processing: database and file management or data structures

Database and file access

Reexamination Certificate

active

07962459

ABSTRACT:
The RMS database for a semiconductor process line is established on the basis of product groups or categories, wherein all members of a category are linked by a common feature, such as a common basic design or a common basic technology. Common process recipes in a specified category may then be set up only once, thereby reducing the amount of effort for establishing the database. Moreover, new product types may be readily incorporated into the categories, thereby enabling the employment of the already-established category-specific context information.

REFERENCES:
patent: 6035293 (2000-03-01), Lantz et al.
patent: 6415192 (2002-07-01), Satoguchi
patent: 6988183 (2006-01-01), Wong
patent: 2002/0086218 (2002-07-01), Tejnil
Johnston, “Installation Experiences on PROMIS,” I.P. Sharp Associates, Toronto, Ontario.

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