Method of providing a conductor layer pattern having parts which

Details Method of providing a conductor layer pattern having parts which Method of providing a conductor layer pattern having parts which

1980-01-28

1981-11-17

Smith, John D.

Coating processes

Electrical product produced

Condenser or capacitor

204192C, 427 89, 427 91, 427124, 427125, 427259, 427282, H01L 21285

Patent

active

043011918

ABSTRACT:
A method is set forth for providing on a substrate surface a conductor pattern having portions which are present at a mutual separation distance smaller than 10 microns by directed deposition of the material for the conductor portions in different directions through a mask which has apertures present comparatively closely beside each other. The mask is arranged at a small distance above the substrate surface. This method is suitable in particular for use in manufacturing semiconductor devices, for example, charge transfer devices.

REFERENCES:
patent: 3700510 (1972-10-01), Keene et al.
patent: 3930065 (1975-12-01), Baker

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