Method of protecting semiconductor chips from mechanical and...

Details Method of protecting semiconductor chips from mechanical and... Method of protecting semiconductor chips from mechanical and...

2005-11-16

2009-06-16

Lee, Hsien-ming (Department: 2823)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

C438S033000, C438S113000, C438S460000, C257S042000, C257S484000, C257S594000, C257SE29015

Reexamination Certificate

active

07547572

ABSTRACT:
A method and apparatus are provided for protecting a semiconductor device from damage. The method includes the steps of providing a active semiconductor device on a surface of the semiconductor substrate where the active device is surrounded by inactive semiconductor areas and providing a soft metallic guard ring only in the inactive semiconductor areas around the periphery of the active device wherein the metallic guard ring is connected to ground potential and not to the active device.

REFERENCES:
patent: 6157066 (2000-12-01), Kobayashi
patent: 7301272 (2007-11-01), Chu et al.
patent: 2002/0097059 (2002-07-01), Tartagni et al.
patent: 2002/0195601 (2002-12-01), Kwasnick et al.
patent: 2005/0191845 (2005-09-01), Takada
patent: 2005/0258901 (2005-11-01), Khorramabadi
patent: 2006/0175697 (2006-08-01), Kurosawa et al.

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