Method of protecting light sensitive regions of integrated circu

Details Method of protecting light sensitive regions of integrated circu Method of protecting light sensitive regions of integrated circu

1998-01-21

2000-10-17

Everhart, Caridad

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

438 57, 438 75, H01L 2100

Patent

active

061330604

ABSTRACT:
A semiconductor device includes at least one active region. A thick dielectric film with an opaque layer embedded therein is deposited over the light sensitive active regions to provide protection from incident light without detrimentally affecting the optical properties of an uppermost optically active layer. An active layer is deposited over the thick dielectric film.

REFERENCES:
patent: 5256891 (1993-10-01), Losee et al.
patent: 5723884 (1998-03-01), Kim

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