Method of protecting bumped semiconductor chips

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board

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Details

427 82, 427 88, 427 93, 427240, 427264, 427270, 427277, 427379, B05D 512, H01L 2188

Patent

active

041729072

ABSTRACT:
A method of protecting from physical damage the upper surface of medium and large scale integrated IC circuit chips. Certain types of IC chips are provided with a plurality of input/output terminals, or bumps, which project above the upper surface of the chips on which they are formed. The upper surface of each such chip, including its bumps, are spin coated with a thin adhesion promoter which is then dried. The chips and its terminals are next spin coated with a layer of a heat curable resin which is partially cured. The resin and the adhesion promoter are then removed from the upper surfaces of the bump by rubbing with a soft abrasive material. The resin remaining on each IC chip is then finally cured.

REFERENCES:
patent: 3165430 (1965-01-01), Hugle
patent: 3549398 (1970-12-01), Watson
patent: 3663277 (1972-05-01), Koepp
patent: 3730751 (1973-05-01), Newberger
patent: 3978578 (1976-09-01), Murphy
patent: 4017340 (1977-04-01), Yerman
patent: 4115602 (1978-09-01), Bullard

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