Method of projecting photoelectron image

Details Method of projecting photoelectron image Method of projecting photoelectron image

1988-01-15

1988-12-06

Anderson, Bruce C.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

2504923, H01L 2130, G03F 727

Patent

active

047897864

ABSTRACT:
A method for projecting a photelectron image includes providing a mask substrate, and selectively contacting a layer which lowers the work function of the mask substrate thereto. Photoelectrons are emitted from the contacted portion.

REFERENCES:
patent: 3679497 (1972-07-01), Handy et al.
patent: 3710101 (1973-01-01), O'Keeffe et al.
patent: 3832560 (1974-08-01), O'Keeffe
patent: 3843916 (1974-10-01), Trotel et al.
patent: 4137458 (1979-01-01), King et al.
patent: 4467210 (1984-08-01), Sugihara et al.
patent: 4572956 (1986-02-01), Tojo et al.

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