Method of producing VDMOS device of increased power density

Details Method of producing VDMOS device of increased power density Method of producing VDMOS device of increased power density

1994-06-14

1995-04-11

Fourson, George

Fishing, trapping, and vermin destroying

437 67, 437203, 148DIG126, 257332, H01L 21265

Patent

active

054057949

ABSTRACT:
A vertical double diffused metal-on-semiconductor device is produced by a method involving the formation of horizontally separated bodies of heavily doped Si and sources by a self-aligned process and a lift-off process along with the formation of trenches having negatively-sloped side-walls.

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