Method of producing transducer isolation in surface acoustic wav

Details Method of producing transducer isolation in surface acoustic wav Method of producing transducer isolation in surface acoustic wav

1983-07-27

1988-09-27

Hall, Carl E.

Metal working

Piezoelectric device making

310313D, 333151, H01L 4122

Patent

active

047731389

ABSTRACT:
An improved manufacturing technique for producing a certain class of Surf Acoustic Wave (SAW) devices, namely those having input and output transducers in close proximity. A much higher manufacturing yield results from eliminating the cutting of a slot in the substrate between input and output transducers as formerly done. This frequently destructive step is replaced by ion-milling of a deep groove between the ports and backfilling with a metal of proper configuration to provide elecromagnetic shielding. The technique produces a new device that is at least equal to the prior art in rejection of unwanted couplings between input and output.

REFERENCES:
patent: 4004254 (1977-01-01), De Vries
patent: 4097825 (1978-06-01), Gerard

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