Method of producing thin-film electroluminescent device using CV

Details Method of producing thin-film electroluminescent device using CV Method of producing thin-film electroluminescent device using CV

1989-05-26

1991-01-01

Silverman, Stanley

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 66, 427 69, 4271261, 4271262, B05D 306

Patent

active

049817124

ABSTRACT:
In producing a thin-film electroluminescent device having a ZnS:Mn film deposited by a MOCVD process using a mixed gas containing an organic zinc compound, an organic sulfur compound and an organic manganese compound, either methyl mercaptan or ethyl mercaptan is used as the sulfur compound and di.pi.-cyclopentadienylmanganese as the manganese compound. The zinc compound is preferably dimethylzinc or diethylzinc. As the merits of using such a combination of organic metal compounds the MOCVD operation can be accomplished at a relatively low substrate temperature, and the deposited ZnS:Mn film is high in the light emitting efficiency and low in the threshold voltage.

REFERENCES:
patent: 4804558 (1989-02-01), Saitoh et al.

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