Method of producing thin film bulk acoustic resonator

Details Method of producing thin film bulk acoustic resonator Method of producing thin film bulk acoustic resonator

2006-11-28

2006-11-28

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S846000, C451S041000, C977S888000

Reexamination Certificate

active

07140084

ABSTRACT:
A method of producing a thin film bulk acoustic resonator having a piezoelectric layer, a first electrode joined to a first surface of the piezoelectric layer, and a second electrode joined to a second surface of the piezoelectric layer, which is located at the opposite side to the first surface, including the steps of forming a pit on a surface of a substrate; filling the pit with a sacrificial layer; polishing a surface of the sacrificial layer so that the RMS variation of a height of the surface of the sacrificial layer is equal to 25 nm or less; forming the first electrode over a partial area of the surface of the sacrificial layer and a partial area of the surface of the substrate; forming the piezoelectric layer on the first electrode so that RMS variation of a height of the second surface of the piezoelectric layer is equal to 5% or less of a thickness of the piezoelectric layer; forming the second electrode on the piezoelectric layer; and removing the sacrificial layer from the inside of the pit by etching.

REFERENCES:
patent: 5801069 (1998-09-01), Harada et al.
patent: 58153412 (1983-09-01), None
patent: 60142607 (1985-07-01), None
patent: 02013109 (1990-01-01), None
patent: 02309708 (1990-12-01), None
patent: 6-232678 (1994-08-01), None
patent: 06295181 (1994-10-01), None
patent: 2000069594 (2000-03-01), None
Sugiyama et al., “Surface Micromachined Micro-Diaphragm Pressure Sensors”, Solid State Sensors and Actuators, 1991, International Conference on Digest of Techical Transducers'91, pp. 188-191, Jun. 1991.

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