Method of producing synthetic quartz glass

Details Method of producing synthetic quartz glass Method of producing synthetic quartz glass

2007-01-09

2007-01-09

Lopez, Carlos (Department: 1731)

Glass manufacturing

Processes

With shaping of particulate material and subsequent fusing...

C065S017600

Reexamination Certificate

active

09930693

ABSTRACT:
Fluorine-containing synthetic quartz glass is produced by feeding silica-forming material, hydrogen, and oxygen gases from a burner to a reaction zone, flame hydrolyzing the silica-forming material in the reaction zone to form particles of silica, depositing the silica particles on a rotatable substrate in the reaction zone to form a porous silica matrix, and heating and vitrifying the porous silica matrix in a fluorine compound gas-containing atmosphere. During formation of the porous silica matrix, the angle between the center axes of the silica matrix and the silica-forming reactant flame from the burner is adjusted to 90–120° so that the porous silica matrix has a density of 0.1–1.0 g/cm3with a narrow distribution within 0.1 g/cm3. The resulting quartz glass has a high transmittance to light in the vacuum ultraviolet region below 200 nm.

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