Method of producing superconducting ceramic patterns by etching

Details Method of producing superconducting ceramic patterns by etching Method of producing superconducting ceramic patterns by etching

1988-11-15

1990-12-25

Simmons, David

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

505728, 156643, 156646, 156656, 1566591, 156667, C23F 102

Patent

active

049803387

ABSTRACT:
Superconducting ceramic patterns are produced by dry etching. A superconducting ceramic film is deposited by plasma CVD on a semiconductor substrate which is covered with a blocking film in advance. The ceramic film is coated with a photomask followed by dry etching in order to remove portions of the ceramic in accordance with the prescribed pattern. The etchant includes bromine.

REFERENCES:
patent: 4557796 (1985-12-01), Druschke et al.
patent: 4837609 (1989-06-01), Gurvitch et al.
Matsui et al., "Reactive Ion Beam Etching of Y-Ba-Cu-O Superconductors", Appl. Phys. Lett. 52(1), Jan. 4, 1988.

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