Metal treatment – Compositions – Heat treating
Patent
1977-08-11
1979-01-09
Dean, R.
Metal treatment
Compositions
Heat treating
29576B, 29576E, 148175, 250492A, 357 91, H01L 754, H01L 21265
Patent
active
041337026
ABSTRACT:
A monocrystalline layer having select structures therein is deposited on a substrate surface from a gas phase or via a molecular beam while the substrate surface is being irradiated with two coherent particle beams superimposed in relation to one another. The coherent particle beams are comprised of particles having an energy of about 10 keV and the substrate is positioned relative to the particle beams so that a maxima of an interference pattern formed by such particle beams is located on the substrate surface.
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patent: 3619608 (1971-11-01), Westerberg
patent: 3709741 (1973-01-01), Gibson et al.
patent: 3833814 (1974-09-01), Nablo
patent: 3924136 (1975-12-01), Heynick et al.
patent: 3999072 (1976-12-01), Takagi
patent: 4035655 (1977-07-01), Guernet et al.
Chang et al., "Smooth . . . Layers of GaAs . . . by MBE", Appl. Phys. Letts. 28 (1976) 39.
Naganuma et al., "Ionized Zn Doping of GaAs Molecular Beam Epitaxial Films", Appl. Phys. Letts. 27 (1975) 342.
Matsunaga et al., "MBE with Ionized Dopant", Electr. Engg. in Japan, 95 (1975) 28-32.
Dean R.
Roy Upendra
Siemens Aktiengesellschaft
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