Method of producing solar cell

Details Method of producing solar cell Method of producing solar cell

1994-11-18

1995-12-05

Weisstuch, Aaron

Fishing, trapping, and vermin destroying

437228, H01L 3118

Patent

active

054728851

ABSTRACT:
A method for producing a thin-film solar cell includes successively depositing a lower anti-reflection film having a relatively large etching rate in a prescribed etchant and an upper anti-reflection film having a relatively small etching rate in the prescribed etchant on a photosensitive surface of a semiconductor substrate; patterning the upper anti-reflection film to form an aperture; and etching the lower anti-reflection film using the patterned upper anti-reflection film as a mask.

REFERENCES:
patent: 4131488 (1978-12-01), Lesk et al.
patent: 4239810 (1980-12-01), Alameddine et al.
patent: 4416053 (1983-11-01), Figueroa et al.
patent: 4498225 (1985-02-01), Gutierrez et al.
patent: 4725559 (1988-02-01), Fraas
Kida et al, "Large-Area, Thin-Substrate Polycrystalline Si Solar Cells Using Surface Passivation Technology", Technical Digest of the International PVSEC-5, 1990, pp. 943-946.

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