Method of producing single crystalline magnetic film having bi-a

Details Method of producing single crystalline magnetic film having bi-a Method of producing single crystalline magnetic film having bi-a

1987-05-29

1989-08-15

Kalafut, Stephen J.

Stock material or miscellaneous articles

All metal or with adjacent metals

Composite; i.e., plural, adjacent, spatially distinct metal...

428642, H01L 2912, B32B 1501

Patent

active

048574155

ABSTRACT:
A single crystal Fe film is deposited on a (100) gallium arsenide substrate by ion beam sputtering the Fe film. The sputtered Fe atoms are imparted with energies in the range of about 1 electron volt to at least 10 electron volts to impart sufficient kinetic energy to said ions to allow said ions to have high surface diffusion rates, thereby permitting the atoms to be located at the proper lattice sites of the Fe crystal formed over the gallium arsenide substrate.

REFERENCES:
patent: 3573485 (1971-04-01), Ballard
patent: 3788890 (1974-01-01), Mader et al.
"Technology of Ion Beam Sources Used in Sputtering" by Harold R. Kaufman, J. Vac. Sci. Technol., 15(2), American Vacuum Society, Mar./Apr. 1978, pp. 272-276.
"Interface Chemistry of Metal-GaAs Schottky-Barrier Contacts" by J. R. Waldrop et al., Appl. Phys. Lett., 34(10), American Institute of Physics, May 1979, pp. 630-632.
"Magnetoresistance Effect of Ni-Fe Film Formed by Ion Beam Sputtering", by Yasuhiro Nagai et al., J. Vac. Sci. Technol., A 4(5), American Vacuum Society, Sep./Oct. 1986, pp. 2364-2368.
"Properties of Fe Single-Crystal Films Grown on (100) GaAs by Molecular-Beam Epitaxy" by J. Krebs et al., J. Appl. Phys., 61(7), Apr. 1, 1987, pp. 2596-2599.
"Iron Thin Films by Means of Dual Ion-Beam Sputtering" by M. Yamaga et al., IEEE Translation Journal on Magnetics in Japan, vol. TJMJ-1, No. 4, Jul. 1985, pp. 488-490.
"X-Ray Characterization of Single-Crystal Fe Films on GaAs Grown by Molecular Beam Epitaxy", by S. B. Qadri et al., J. Vac. Sci. Technol. B, vol. 3, No. 2, Mar./Apr. 1985, pp. 719-721.
"Molecular Beam Epitaxial Growth of Single-Crystal Fe Films on GaAs", by G. A. Prinz et al., App. Phys. Lett., 39(5), Sep. 1, 1981, pp. 397-399.
"Single Crystal Fe Films Grown on GaAs Substrates" by W. Wettling et al., Journal of Magnetism and Magnetic Materials, 28, (1982), pp. 299-304.

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