Method of producing saturated vapor of solid metal organic compo

Details Method of producing saturated vapor of solid metal organic compo Method of producing saturated vapor of solid metal organic compo

1989-07-05

1990-04-17

Cohan, Alan

Drying and gas or vapor contact with solids

Apparatus

With means to treat gas or vapor

34 22, 34 57A, 422306, 137268, C30B 2514

Patent

active

049168282

ABSTRACT:
A method of producing saturated vapor of solid metal organic compounds in the metal organic chemical vapor deposition method is disclosed, which is characterized in that, into a cylinder for metal organic chemical vapor deposition having a structure that an introducing port and a discharging port of carrier gas are provided respectively to the cylinder for metal organic chemical vapor deposition and a tube directly connected to either of these is inserted into the cylinder, a solid metal organic compound and a packing material are charged and a carrier gas fed from introducing port into cylinder is discharged from discharging port to outside of cylinder.

REFERENCES:
patent: 3734999 (1988-04-01), Fujisawa

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