Method of producing micro structure, method of producing...

Details Method of producing micro structure, method of producing... Method of producing micro structure, method of producing...

2006-01-17

2006-01-17

Chu, John S. (Department: 1752)

Radiation imagery chemistry: process, composition, or product th

Diazo reproduction, process, composition, or product

Composition or product which contains radiation sensitive...

C430S320000, C430S394000, C347S020000, C347S045000, C347S046000, C347S047000, C029S890100

Reexamination Certificate

active

06986980

ABSTRACT:
The present invention discloses a method of producing a liquid flow path shape capable of refilling ink at a high speed by optimizing a three-dimensional shape of the liquid flow path and suppressing the vibration of a meniscus and a head thereof. According to the invention, a pattern to form the liquid flow path to be formed on a substrate with a heater is formed by a positive photosensitive material in a two-layered structure of upper and lower layers, and the lower layer is used for forming the liquid flow path after being thermally crosslinked.

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