Method of producing liquid-crystal display device

Details Method of producing liquid-crystal display device Method of producing liquid-crystal display device

1984-10-29

1986-07-08

Hoffman, James R.

Coating processes

Electrical product produced

Condenser or capacitor

204192C, 427 38, 427 57, 427 87, 427 88, 427 89, 427 90, 427 91, B05D 512

Patent

active

045992460

ABSTRACT:
A thin film transistor array for a liquid crystal display device is produced by simultaneously forming gate electrodes and picture element electrodes; forming islands of a layered structure comprised of a gate insulating film, a thin semiconductor film and a light shielding film in a single masking step; and forming the gate, source and drain wiring metals in contact windows by the "lift-off" technique after using a resist film for opening the contact windows. Only three masking steps are required thereby enabling an increase in production yield and a lower production cost as compared to conventional techniques which typically require seven masking steps.

REFERENCES:
patent: 4452826 (1984-06-01), Shields et al.

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