Method of producing lead zirconate titanate-based thin film,...

Details Method of producing lead zirconate titanate-based thin film,... Method of producing lead zirconate titanate-based thin film,...

2006-05-09

2006-05-09

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S358000, C501S134000, C257S347000, C257S627000, C252S06290R

Reexamination Certificate

active

07042141

ABSTRACT:
A lead zirconate titanate-based thin film is an epitaxial crystal thin film and has a chemical composition represented by the general formula Pb1-xLnxZryTi1-yO3(wherein Ln represents any one selected from the group consisting of lanthanum, lanthanoid elements, niobium, calcium, barium, strontium, iron, manganese and tin; and 0≦x<1, 0.43≦y≦0.65) and whose orientation is {111} (including orientations whose tilt angle from the direction perpendicular to the substrate surface is within 15°).

REFERENCES:
patent: 5198269 (1993-03-01), Swartz et al.
patent: 6419848 (2002-07-01), Qiu et al.
patent: 513478 (1992-11-01), None
patent: 6-30154 (1994-12-01), None
patent: 01-220676 (2001-08-01), None
patent: 03-017767 (2003-01-01), None

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