Method of producing iron oxide photo masks

Details Method of producing iron oxide photo masks Method of producing iron oxide photo masks

1978-01-25

1980-04-22

Hoffman, James R.

Coating processes

Coating has x-ray, ultraviolet, or infrared properties

427164, 427168, B05D 102, B05D 302

Patent

active

041996216

ABSTRACT:
Method of producing photomasks of X-ray amorphous iron oxide (Fe.sub.2 O.sub.3) by spraying a transparent substrate at a temperature between 180.degree. and 250.degree. C. with a solution of an hydrolysable iron salt in a polar organic solution or, in accordance with a variant of this method, at a temperature between 180.degree. and 750.degree. C. with a solution of a hydrolysable iron salt which also contains a salt of a metal having a greater ion diameter. If temperatures above approximately 230.degree. C. are used, the solvent may in the latter case also consist of water only.

REFERENCES:
patent: 3824100 (1974-07-01), Griest
patent: 3984591 (1976-10-01), Plumat et al.

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