Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1979-09-28
1981-06-02
Smith, Ronald H.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
65 3A, 138145, 138177, 204164, 350 9631, 427 39, 427163, 427167, 427231, 427237, 427255, B05D 306, C23C 1100
Patent
active
RE0306355
ABSTRACT:
In the reactive deposition of the core material from a gas which is passed through the tube onto the inner wall of the tube by means of a plasma zone, while a relative motion is effected in the axial direction between the tube and a plasma-producing device, the rate of precipitation is increased without impairing the quality of the core material coat, the reactive deposition being effected at a pressure of from 1 to 100 Torr and a temperature zone being superimposed on the plasma zone.
REFERENCES:
patent: 3484276 (1969-12-01), Burggraaf et al.
patent: 3711262 (1973-01-01), Keck et al.
patent: 3932162 (1976-01-01), Blankenshid
patent: 3934061 (1976-01-01), Keck et al.
patent: 3938974 (1976-02-01), Macedo et al.
patent: 3957474 (1976-05-01), Kobayashi et al.
patent: 3961926 (1976-06-01), Asam
patent: 4011006 (1977-03-01), Fleming, Jr. et al.
Powell, C. F., et al., Vapor Deposition The Electrochemical Society, John Wiley and Son, Inc., New York (1966), p. 424.
Kuppers Dieter
Lydtin Hans
Rehder Ludwig
Page Thurman K.
Smith Ronald H.
U.S. Philips Corporation
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