Method of producing III-nitride substrate

Stone working – Sawing – Endless

Reexamination Certificate

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C438S481000

Reexamination Certificate

active

07464702

ABSTRACT:
An ingot3of a hexagonal III-nitride crystal is cut using a wire array21composed of a wire22. On this occasion, the ingot3is cut in such a manner that the ingot3is sliced with supply of an abrasive fluid while feeding at least one of the ingot3and wire22in a direction perpendicular to an extending direction B of the wire22. During cutting the ingot3, the extending direction B of the wire22is inclined at 3° or more to the {1-100} plane of the ingot3.

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Notification of Transmittal of Copies of Translation of the International Preliminary Report on Patentability (Chapter I or Chapter II of the Patent Cooperation Treaty) dated Jul. 19, 2007, issued in PCT/JP2005/023918.

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