Method of producing III-nitride substrate

Details Method of producing III-nitride substrate Method of producing III-nitride substrate

2007-05-29

2007-05-29

Ackun, Jr., Jacob K. (Department: 3723)

Abrading

Abrading process

Utilizing fluent abradant

C125S016020, C125S021000, C083S651100

Reexamination Certificate

active

11486216

ABSTRACT:
An ingot3of a hexagonal III-nitride crystal is cut using a wire array21composed of a wire22. On this occasion, the ingot3is cut in such a manner that the ingot3is sliced with supply of an abrasive fluid while feeding at least one of the ingot3and wire22in a direction perpendicular to an extending direction B of the wire22. During cutting the ingot3, the extending direction B of the wire22is inclined at 3° or more to the {1-100} plane of the ingot3.

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