Method of producing II-V compound semiconductors

Details Method of producing II-V compound semiconductors Method of producing II-V compound semiconductors

1985-03-05

1986-12-16

Weisstuch, Aaron

Metal treatment

Compositions

Heat treating

148171, 148186, 148189, 148DIG18, 148DIG125, 20419221, 20419225, 2504922, 136260, 136265, 427 85, 427 87, H01L 2138

Patent

active

046295143

ABSTRACT:
A method of producing II-V compound semiconductors with greatly reduced intrinsic defect levels comprises the step of causing atoms or ions of at least one member selected from the group consisting of hydrogen and the halogens to be injected into and diffused through II-V compound semiconductors during or after the production thereof.

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M. H. Brodsky, Editor, "Amorphous Semiconductors", Springer-Verlag (1979), pp. 191-201.
R. Nitsche et al., J. Phys. Chem. Solids, vol. 21, pp. 199-205 (1961).
R. Nitsche, J. Phys. Chem. Solids, vol. 17, pp. 163-165 (1960).
T. Suda et al., Appl. Phys. Lett., vol. 45, pp. 775-777 (1984).

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