Method of producing homogeneously doped n-type Si monocrystals a

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board

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148 15, 357 63, 357 91, B05D 306

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040270513

ABSTRACT:
Homogeneously doped Si monocrystals of the n-type are produced from p- or n-type Si crystals having a random dopant concentration in radial and axial directions of the crystal and the dopant concentration within such crystals is adjusted by subjecting such crystals to controlled thermal neutron radiation.

REFERENCES:
patent: 3076732 (1963-02-01), Tanenbaum
Tanenbaum et al., "J. Electrochemical Soc." vol. 108, No. 2, Feb. 1961, pp. 171-176.

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