Method of producing highly precise charged beam drawing data div

Details Method of producing highly precise charged beam drawing data div Method of producing highly precise charged beam drawing data div

1997-11-13

2000-07-11

Teska, Kevin J.

G06F 1750

Patent

active

060885203

ABSTRACT:
A method of producing charged beam drawing data includes a basic figure processing step of performing a basic figure processing to design layout data to output basic figure data, a first segmenting step of converting the basic figure data as if segmenting a basic figure over a boundary of a figure processing region in the basic figure data by the boundary, a first searching step of searching a minute figure to draw which satisfies a prescribed size condition among the figures produced by segmenting in said first segmenting step, a restoring step of integrating the minute figure to draw searched by said first searching step and a figure adjacent to the minute figure, and performing a further basic figure processing to restore the figures in said basic figure data, an allocating step of allocating the figures restored by said restoring step to drawing fields, and a step of converting the figures allocated by the allocating step to charged beam drawing data.

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Cheng, C-I. and Ho, C-y "SEFOP: A Novel Approach to Data Path Module Placement," IEEE/ACM International Conference on Computer-Aided Design, Nov. 1993.

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